Sputter coater Quorum Q300 TT
DEVICE IS FOR:
High vacuum sputter coater for thin film and SEM applications. System is suitable for non-oxidising metals such as gold (Au), platinum (Pt) or oxidising metals such as aluminium (Al), chromium (Cr) with film thickness monitoring and turbomolecular pump for vacuum.
To ensure even deposition coaters is fitted with a rotating specimen stage and three individual magnetron target assemblies. Operating gas is argon. Targets made of Cr, Ag, and Al are available immediately.
SURFACE MODIFICATIONS
