Profilometer mechanical and optical

The Bruker Dektak XT-E contact profilometer is capable of measuring step-heights, patterned features, and other parameters by sensing the deflection of a fine stylus with diamond tip having a diameter 2.5 μm and force from 0.03 mg to 15 mg. Manual X-Y stage (4”), 3.1 Mpix digital camera for samples displaying. Vertical resolution 1 nm. Bruker’s optical microscope CONTOUR GT-K images surfaces and rougness in 2D/3D based on phase shifting interferometry (PSI mode) and vertical scanning interferometry (VSI mode) with automatic zoom lenses (FOV) 0.55x, 1x and 2x and parfocal interferometry objectives/lenses Michelson 2.5x (working distance 3.48 mm) and Miran 20x (working distance 4.7 mm). Automatic focusing in Z axis and motorized X-Y sample stage (6”). High-speed (100fps) monochrome camera 640x480. Maximal scan range is 10 mm, vertical resolution 0.01 nm (as indicated by Bruker) and lateral resolution 0.5 μm.